Specifications/ Features:

• Capable of sorting and storing wafer of 200mm.

• Compatible with all SEMI compliant OCS and SMIF.

• N Load ports based on customer requirements. (N=2~4)

• Optimized mini environment design.

• Deliver best in class cleanliness with ISO Class 1 performance.

• Offers a variety of optional functions, OCR, FLIPPER.

• Can store maximum 600pieces Wafer.

• Power Supply: Single phase 220V AC 10%, 50/60Hz 5%

• Equipment Power: 14kVA (40A/200V AC) with FFU

• Vacuum Pressure 90 kPa to 80 kPa

• Vacuum Flow Rate: 50 L/min

• Compressed Air Pressure Requirement: 0.6 MPa to 0.7 MPa

• Compressed Air Flow Rate: 50 L/min

• Equipment Size(mm): W*D*H =2650*1600*2650

• Wafer Storage 600PCS