Temporary storage rack (2*25, 4*25)  for wafers etching equipment.

Wafer transfer position for chemical mechanical polishing equipment.

Incoming wafer ports for Physical Vapor Deposition (PVD)

SMIF, temperature control module, flipping mechanism for inspection equipment.

Flipping arm for grinding equipment.

Wafer fork type robot for ion implantation equipment and for deionization equipment.

Robots for Canon lithography equipment.