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AUTOMATIC WAFER MOUNTER AND DETAPPER SYSTEM：AWM300A

Specifications/ Features:

AWM300A_edited.png

  • 8” and 12” wafer Handling

  • 1 Load port For FOSB/FOUP

  • 1 Metal cassette output

  • Detection of Wafer Protrusion from Cassette

  • Wafer Cross Slot Detection 

  • Roller with tensioning control Mounting

  • Bernoulli end effector wafer handling

  • Advanced 3-axis Robot Assembly

  • Intelligence Wafer Pre-alignment

  • Build in OCR

  • Recipe Wafer Control System

  • Handheld Barcode reader for Lot Tracking

  • Industrial PC Base Software

  • Capable to handle Jelly Jar , Coin box and FOSB(Option)

AUTOMATIC EXPANDER & REMOUNTER SYSTEM：AWE200C

AWE200C_edited.png

Specifications/ Features:

  • Capable to Handle Frame Wafer Expansion to Different Carrier

  • Capable to Separate Thin Wafer 

  • UV Irradiation Function Available 

  • Tape Expansion with Remounter

  • ESD Ionizer Blower

  • Industrial PC Control

  • Advanced Recipe Control System

  • Hand held Barcode Scanner for Lot Tracking

  • SEC/GEMS Compliance (Option)

AUTOMATIC WAFER TAPER/DETAPER：AST2308

Specifications/ Features:

Automatic BG Tape Wafer Taper De Taper_e

  • Multi Size Wafers Handling

  • Handling of25/13 slots Wafer Cassette

  • Advanced wafer handling build in Vacuum end effector

  • Advanced Robot Transfer Arm

  • Single Taping Mode

  • Build in Heater Chuck Table

  • Build in SMART Wafer Aligner

  • Wafer ID Reader (Option)

  • SECS GEM Compliance ( Option )

  • Industrial PC control

  • Heater Blade (Optional)

  • Laser Sensors for transparent Material ( Optional )

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