2x, 3x or 4x Wafer Cassette ( White/Metal ) Or Coin Stacked Box Handling (Option)

6” & 8″ wafers Handling (Option-4”, 5” wafer)

Handling of 25/13 slots Wafer Cassette

Advanced wafer handling build-in Vacuum end effector (Option-Bernoulli Thin Wafer Handling)

Advanced Robot Transfer Arm

Wafer Flipper Arm (Option)

Build in SMART Wafer Pre-Aligner

Wafer ID Reader (Option)

Sorting Wafer, Pick & Place between Slot

Host Interface / Secs-Gem Compliance(Option)

Industrial PC control

Build in Macro/Micro Inspection (Option)