

AUTOMATIC WAFER HANDLING WITH METHODOLOGY SYSTEM:AWA300/WL300F

Specifications/ Features:
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12” wafer Handling (Optional for 8”)
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Loadport For FOSB/FOUP, Slot Cassette
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Capable to handle Jelly Jar , Coin box, HWS-ring and FOSB.
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Detection of Wafer Protrusion from Cassette
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Wafer Cross Slot Detection
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Wafer At Cassette Mapping Graphic
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Bernoulli End Effector for THIN & WARPED wafer handling, build in vacuum selection
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Advanced Robot Assembly
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Intelligence Wafer alignment, Wafer Centering and Notch / Flat Finding
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Build in Wafer ID/OCR Reader
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Recipe Wafer Control System
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Handheld Barcode reader for Lot Tracking
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Wafer Flipper Assembly
AUTOMATIC FFC LABELING AND
SORTING MACHINE:
AMWS300M

Specifications/ Features:
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8” Wafer Frame handling
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Single input and 4 output
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Metal cassette wafer frame/ Shipping Box
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Detection of Wafer Protrusion from Cassette
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Wafer Cross Slot Detection
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Wafer At Cassette Mapping Graphic
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Build in OCR
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Recipe Frame Control System
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Handheld Barcode reader for Lot Tracking
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Wafer Flipper Assembly
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Auto Labeller and Barcode printer
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Industrial PC Base Software
AUTOMATIC WAFER FRAME HIGH-SPEED LABELER:AWFS200

Specifications/ Features:
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Single input and single output
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Barcode Reader
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Up to 400 Wafer Frame per Hour
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8” and 12” frame (Option)
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Handling 25 Slot Metal frame Cassette
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Wafer Frame mapping
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Wafer Frame protrusion Sensor
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Advanced Robot Transfer Arm
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Chuck with rotator
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Wafer ID Reader (Option)
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Host Interface / Secs-Gem Compliance(Option)
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Industrial PC control
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Capable to integrate with Vision for Saw Street inspection
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Auto Labeller and Barcode printer