12” wafer Handling (Optional for 8”)

4x Loadport For FOSB/FOUPCapable to handle Jelly Jar , Coin box and FOSB.

Detection of Wafer Protrusion from Cassette

Wafer Cross Slot Detection

Wafer At Cassette Mapping Graphic

Bernoulli end effector wafer handling, build in vacuum selection

Advanced 3-axis Robot Assembly

Intelligence Wafer alignment, Wafer Centering and Notch / Flat Finding

Build in WID OCR Reader

Recipe Wafer Control System

Handheld Barcode reader for Lot Tracking

Wafer Flipper Assembly

PC Base Software

Build in N2 purging for Loadport