top of page

AUTOMATIC WAFER SORTER: 
AWS3004/ CBUP

AWS3004CBUP_edited.png

Specifications/ Features:

  • 12” wafer Handling (Optional for 8”)

  • 4x Loadport For FOSB/FOUPCapable to handle Jelly Jar , Coin box and FOSB.

  • Detection of Wafer Protrusion from Cassette

  • Wafer Cross Slot Detection

  • Wafer At Cassette Mapping Graphic

  • Bernoulli end effector wafer handling, build in vacuum selection

  • Advanced 3-axis Robot Assembly

  • Intelligence Wafer alignment, Wafer Centering and Notch / Flat Finding

  • Build in WID OCR Reader

  • Recipe Wafer Control System

  • Handheld Barcode reader for Lot Tracking

  • Wafer Flipper Assembly

  • PC Base Software

  • Build in N2 purging for Loadport

STANDARD WAFER SORTER STOCKER 

WAFER SORTER STOCKER_edited_edited.png

Specifications/ Features:

  • Capable of sorting and storing wafer of 200mm.

  • Compatible with all SEMI compliant OCS and SMIF.

  • N Load ports based on customer requirements. (N=2~4)

  • Optimized mini environment design.

  • Deliver best in class cleanliness with ISO Class 1 performance.

  • Offers a variety of optional functions, OCR, FLIPPER.

  • Can store maximum 600pieces Wafer.

  • Power Supply: Single phase 220V AC 10%, 50/60Hz 5%

  • Equipment Power: 14kVA (40A/200V AC) with FFU

  • Vacuum Pressure 90 kPa to 80 kPa

  • Vacuum Flow Rate: 50 L/min

  • Compressed Air Pressure Requirement: 0.6 MPa to 0.7 MPa

  • Compressed Air Flow Rate: 50 L/min

  • Equipment Size(mm): W*D*H =2650*1600*2650

  • Wafer Storage 600PCS

bottom of page