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Specifications/ Features:
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8” and 12” wafer Handling
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1 Load port For FOSB/FOUP
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1 Metal cassette output
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Detection of Wafer Protrusion from Cassette
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Wafer Cross Slot Detection
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Roller with tensioning control Mounting
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Bernoulli end effector wafer handling
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Advanced 3-axis Robot Assembly
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Intelligence Wafer Pre-alignment
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Build in OCR
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Recipe Wafer Control System
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Handheld Barcode reader for Lot Tracking
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Industrial PC Base Software
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Capable to handle Jelly Jar , Coin box and FOSB(Option)
Request for
Quotation/ Details
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