12” wafer Handling (Optional for 8”)

Loadport For FOSB/FOUP, Slot Cassette

Capable to handle Jelly Jar , Coin box, HWS-ring and FOSB.

Detection of Wafer Protrusion from Cassette

Wafer Cross Slot Detection

Wafer At Cassette Mapping Graphic

Bernoulli End Effector for THIN & WARPED wafer handling, build in vacuum selection

Advanced Robot Assembly

Intelligence Wafer alignment, Wafer Centering and Notch / Flat Finding

Build in Wafer ID/OCR Reader

Recipe Wafer Control System

Handheld Barcode reader for Lot Tracking

Wafer Flipper Assembly