Multi Size Wafers Handling

Handling of25/13 slots Wafer Cassette

Advanced wafer handling build in Vacuum end effector

Advanced Robot Transfer Arm

Single Taping Mode

Build in Heater Chuck Table

Build in SMART Wafer Aligner

Wafer ID Reader (Option)

SECS GEM Compliance ( Option )

Industrial PC control

Heater Blade (Optional)

Laser Sensors for transparent Material ( Optional )